Nanomanufacturing

EE292L

Stanford School of Engineering


Thumbnail

Description

This course covers the fundamentals of nanomanufacturing technology and applications. Flip classroom model is used, supplementing classroom lectures with short videos. Guest speakers include distinguished engineers, entrepreneurs and venture capitalists who are actively engaged in nanomanufacturing.

Prerequisites

Background in device physics and process technology

Topics include

  • Recent developments in process technology, lithography and patterning
  • Technology for FinFET transistors, NAND flash and 3D chips
  • Manufacturing of MEMS, LEDs, etc