Introduction to Micro and Nano Electromechanical Systems


Stanford School of Engineering



Miniaturization technologies now have important roles in materials, mechanical and biomedical engineering, in addition to being the foundation for information technology. This course provides an introduction to MEMS/NEMS fabrication techniques, selected device applications, and the design tradeoffs in developing systems.



An undergraduate GPA of 3.3 or better.

Topics include

  • Electro-mechanical systems
  • Microfabrication
  • Microtechnology
  • Nanotechnology

Note on Course Availability

The course schedule is displayed for planning purposes – courses can be modified, changed, or cancelled. Course availability will be considered finalized on the first day of open enrollment. For quarterly enrollment dates, please refer to our graduate certificate homepage.